SmartPrint UV Maskless Lithography

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SmartPrint UV Maskless Lithography

SmartPrint UV is a maskless lithography equipment, based on a DMD projection technology, compatible with a wide range of resists and substrates. It can produce any 2D shapes at micron resolution without the need for a hard mask. SmartPrint UV is perfectly designed for any application fields requiring surface micro patterning such as microfluidics, biotechnologies and micro-electronics.

  • Compatible with i, h and g-line photoresists such as SU8 or AZ® 1500 series
  • Work with a wide range of substrates inclusive the non-standard substrates (non-flat, flexible, thick)
  • Writing resolution down to 1.5µm
  • Adjustable writing field and resolution with exchangeable objectives
  • Compatible with any sample size up to 5" square masks
  • Intuitive alignment method with direct overlay of the design on the sample
  • Tabletop with small footprint
  • Time and money saving due to the absence of a hard-mask